Concepedia

Dennis O. Ouma

DO

Statistics

Publications

9

Citations

430

H-Index

9

Active since

1997

Affiliations

Massachusetts Institute of Technology(Current)

Texas Instruments (United States)

Dennis O. Ouma is an author at Massachusetts Institute of Technology specializing in engineering, semiconductor devices, and planarization.

Publications per year

1997–2002

9

Publications

9

Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing

B.E. Stine, Dennis O. Ouma, R. Divecha et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 139 citations

Engineering, Electrical Engineering, Materials Science +16

Characterization and modeling of oxide chemical-mechanical polishing using planarization length and pattern density concepts

Dennis O. Ouma, Duane S. Boning, J.E. Chung et al. · IEEE Transactions on Semiconductor Manufacturing · 2002 · 136 citations

Engineering, Electrical Engineering, Materials Science +17

An integrated characterization and modeling methodology for CMP dielectric planarization

Dennis O. Ouma, Duane S. Boning, J.E. Chung et al. · 2002 · 54 citations

Engineering, Electrical Engineering, Materials Science +16

Pattern Dependent Modeling for CMP Optimization and Control

Duane S. Boning, ByungKun Lee, Charles Oji et al. · MRS Proceedings · 1999 · 29 citations

Natural Sciences, Operations Management, Design Optimization +12

EFFECT OF FINE-LINE DENSITY AND PITCH ON INTERCONNECT ILD THICKNESS VARIATION IN OXIDE CMP PROCESSES

R. Divecha, B.E. Stine, Dennis O. Ouma et al. · 1997 · 19 citations

Engineering, Electrical Engineering, Materials Science +14

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