Concepedia

Leslie Charns

LC

Statistics

Publications

3

Citations

101

H-Index

3

Active since

2004

Affiliations

University of Arizona(Current)

Leslie Charns is an author at University of Arizona specializing in materials engineering, materials science, and materials processing.

Publications per year

2004–2005

3

Publications

3

Arrhenius Characterization of ILD and Copper CMP Processes

J. Sorooshian, Darren DeNardis, Leslie Charns et al. · Journal of The Electrochemical Society · 2004 · 65 citations

, , +15

Analysis of Frictional Heating of Grooved and Flat CMP Polishing Pads

Len Borucki, Leslie Charns, Ara Philipossian · Journal of The Electrochemical Society · 2004 · 20 citations

, , +15

Mechanical properties of chemical mechanical polishing pads containing water-soluble particles

Leslie Charns, Masano Sugiyama, Ara Philipossian · Thin Solid Films · 2005 · 16 citations

, , +7

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