Concepedia

Ara Philipossian

AP

98

Publications

2.4K

Citations

27

H-Index

1992

Active since

Affiliations

University of Arizona(Current)

Arthritis and Rheumatism Associates

Intel (United States)

Tufts University

Hitachi (Japan)

Ara Philipossian is an author at University of Arizona specializing in engineering, materials science, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMicrofabricationSurface ScienceChemical EngineeringMaterials EngineeringApplied PhysicsMicrostructureMicroelectronics

Publications per year

1992–2020

98

Publications

98

The IMEC clean : A new concept for particle and metal removal on Si surfaces

Marc Meuris, Paul Mertens, A. Opdebeeck et al. · 1995 · 125 citations

Materials Science, Materials Engineering, Imec Clean +12

Fundamental Tribological and Removal Rate Studies of Inter-Layer Dielectric Chemical Mechanical Planarization

Ara Philipossian, Scott R. Olsen · Japanese Journal of Applied Physics · 2003 · 99 citations

Materials Science, Boundary Lubrication, Tribological Coating +14

Arrhenius Characterization of ILD and Copper CMP Processes

J. Sorooshian, Darren DeNardis, Leslie Charns et al. · Journal of The Electrochemical Society · 2004 · 65 citations

Materials Engineering, Materials Science, Generalized Preston +15

Determining the Effects of Slurry Surfactant, Abrasive Size, and Abrasive Content on the Tribology and Kinetics of Copper CMP

Z. Li, K. Ina, Paul G. LeFevre et al. · Journal of The Electrochemical Society · 2005 · 58 citations

Materials Science, Copper Cmp, Chemical Engineering +15

Measurements of Slurry Film Thickness and Wafer Drag during CMP

Jeffrey Lu, Chris Rogers, Vincent P. Manno et al. · Journal of The Electrochemical Society · 2004 · 53 citations

Engineering, Microscopy, Wafer Drag +20

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