Concepedia

Z. Li

ZL

4

Publications

197

Citations

4

H-Index

2004

Active since

Affiliations

University of Arizona(Current)

Middle East Studies Association of North America

Z. Li is an author at University of Arizona specializing in engineering, mechanical engineering, and corrosion.

Top concepts

CorrosionEngineeringMaterial ScienceMechanical EngineeringHeat TransferMicrostructureThermodynamicsSurface ScienceThermal EngineeringChemical Engineering

Publications per year

2004–2005

4

Publications

4

Arrhenius Characterization of ILD and Copper CMP Processes

J. Sorooshian, Darren DeNardis, Leslie Charns et al. · Journal of The Electrochemical Society · 2004 · 65 citations

Materials Engineering, Materials Science, Generalized Preston +15

Determining the Effects of Slurry Surfactant, Abrasive Size, and Abrasive Content on the Tribology and Kinetics of Copper CMP

Z. Li, K. Ina, Paul G. LeFevre et al. · Journal of The Electrochemical Society · 2005 · 58 citations

Materials Science, Copper Cmp, Chemical Engineering +15

Effect of Slurry Flow Rate on Tribological, Thermal, and Removal Rate Attributes of Copper CMP

Z. Li, L. Borucki, Isamu Koshiyama et al. · Journal of The Electrochemical Society · 2004 · 51 citations

Slurry Flow Rate, Engineering, Mechanical Engineering +22

Experimental and Theoretical Investigation of Heating and Convection in Copper Polishing

L. Borucki, Z. Li, Ara Philipossian · Journal of The Electrochemical Society · 2004 · 23 citations

Engineering, Mechanical Engineering, Pad Thermal Data +18

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