Concepedia

J. Sorooshian

JS

Statistics

Publications

4

Citations

175

H-Index

4

Active since

2003

Affiliations

University of Arizona(Current)

Sandia National Laboratories

J. Sorooshian is an author at University of Arizona specializing in materials science, materials engineering, and chemical mechanical planarization.

Publications per year

2003–2005

4

Publications

4

Arrhenius Characterization of ILD and Copper CMP Processes

J. Sorooshian, Darren DeNardis, Leslie Charns et al. · Journal of The Electrochemical Society · 2004 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +15

Tribology and Removal Rate Characteristics of Abrasive-Free Slurries for Copper CMP Applications

Darren DeNardis, J. Sorooshian, Masanobu Habiro et al. · Japanese Journal of Applied Physics · 2003 · 46 citations

Engineering, Materials Engineering, Materials Science +16

Revisiting the Removal Rate Model for Oxide CMP

J. Sorooshian, L. Borucki, David J. Stein et al. · Journal of Tribology · 2005 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of Process Temperature on Coefficient of Friction during CMP

J. Sorooshian, Dale L. Hetherington, Ara Philipossian · Electrochemical and Solid-State Letters · 2004 · 30 citations

Engineering, Materials Engineering, Materials Science +13

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