Concepedia

Darren DeNardis

DD

Statistics

Publications

11

Citations

276

H-Index

10

Active since

2003

Affiliations

University of Arizona(Current)

Intel (United States)

Saitama University

Darren DeNardis is an author at University of Arizona specializing in materials engineering, materials science, and engineering.

Publications per year

2003–2009

11

Publications

11

Arrhenius Characterization of ILD and Copper CMP Processes

J. Sorooshian, Darren DeNardis, Leslie Charns et al. · Journal of The Electrochemical Society · 2004 · 65 citations

, , +15

Tribology and Removal Rate Characteristics of Abrasive-Free Slurries for Copper CMP Applications

Darren DeNardis, J. Sorooshian, Masanobu Habiro et al. · Japanese Journal of Applied Physics · 2003 · 46 citations

, , +16

Characterization of copper-hydrogen peroxide film growth kinetics

Darren DeNardis, D. Rosales-Yeomans, L. Borucki et al. · Thin Solid Films · 2006 · 41 citations

, , +12

Design and Evaluation of Pad Grooves for Copper CMP

D. Rosales-Yeomans, Darren DeNardis, L. Borucki et al. · Journal of The Electrochemical Society · 2008 · 30 citations · Full text

, , +17

Development and Analysis of a High-Pressure Micro Jet Pad Conditioning System for Interlayer Dielectric Chemical Mechanical Planarization

Yoshiyuki Seike, Darren DeNardis, Masano Sugiyama et al. · Japanese Journal of Applied Physics · 2005 · 19 citations

, , +13

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