Concepedia

D. Rosales-Yeomans

DR

9

Publications

202

Citations

9

H-Index

2004

Active since

Affiliations

University of Arizona(Current)

Intel (United States)

Saitama University

D. Rosales-Yeomans is an author at University of Arizona specializing in engineering, mechanical engineering, and microfabrication.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceMicrofabricationSurface ScienceMicroelectronicsElectronic PackagingCorrosionMicrostructureChemical Kinetics

Publications per year

2004–2011

9

Publications

9

Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP

D. Rosales-Yeomans, Toshiro Doi, M. Kinoshita et al. · Journal of The Electrochemical Society · 2004 · 46 citations

Materials Science, Tribological Coating, Engineering +14

Characterization of copper-hydrogen peroxide film growth kinetics

Darren DeNardis, D. Rosales-Yeomans, L. Borucki et al. · Thin Solid Films · 2006 · 41 citations

Engineering, Corrosion, Oxidation Resistance +5

Design and Evaluation of Pad Grooves for Copper CMP

D. Rosales-Yeomans, Darren DeNardis, L. Borucki et al. · Journal of The Electrochemical Society · 2008 · 30 citations · Full text

Engineering, Mechanical Engineering, Mineral Processing +17

Effect of concentric slanted pad groove patterns on slurry flow during chemical mechanical planarization

D. Rosales-Yeomans, H. Lee, T. Suzuki et al. · Thin Solid Films · 2011 · 22 citations

Pad Groove Patterns, Engineering, Microfabrication +6

Studying the effect of temperature on the copper oxidation process using hydrogen peroxide for use in multi-step chemical mechanical planarization models

Darren DeNardis, D. Rosales-Yeomans, L. Borucki et al. · Thin Solid Films · 2009 · 16 citations

Process Design, Chemical Engineering, Engineering +9

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