Effect of concentric slanted pad groove patterns on slurry flow during chemical mechanical planarization - Concepedia

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Effect of concentric slanted pad groove patterns on slurry flow during chemical mechanical planarization

22

Citations

1

References

2011

Year

D. Rosales-Yeomans, H. Lee, T. Suzuki, Ara Philipossian

Thin Solid Films

Pad Groove PatternsEngineeringMicrofabricationMechanicsMechanical EngineeringSlurry FlowRheologyMultiphase FlowChemical Mechanical Planarization

References

	Year	Citations

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