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Studying the effect of temperature on the copper oxidation process using hydrogen peroxide for use in multi-step chemical mechanical planarization models

Process DesignChemical EngineeringEngineeringCorrosionOxidation ResistanceMechanical EngineeringMetallurgical ProcessCopper Oxidation ProcessChemical KineticsHydrogen PeroxideMetal ProcessingThermomechanical Processing