Concepedia

Toshiro Doi

TD

Statistics

Publications

40

Citations

1.2K

H-Index

19

Active since

2004

Affiliations

Kyushu University(Current)

The University of Osaka

Saitama University

Keio University

Iwate Medical University

Toshiro Doi is an author at Kyushu University specializing in engineering, materials science, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMicrofabricationApplied PhysicsMaterials EngineeringSurface ScienceMaterial ProcessingChemical EngineeringMicrostructure

Publications per year

2004–2022

40

Publications

40

Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

Hideo Aida, Toshiro Doi, Hidetoshi Takeda et al. · Current Applied Physics · 2012 · 250 citations

Materials Engineering, Semiconductor Technology, Electrical Engineering +11

Chemical Mechanical Polishing of Gallium Nitride with Colloidal Silica

Hideo Aida, Hidetoshi Takeda, Koji Koyama et al. · Journal of The Electrochemical Society · 2011 · 91 citations

Materials Science, Surface Characterization, Chemical Engineering +11

Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Hideo Aida, Hidetoshi Takeda, Seong‐Woo Kim et al. · Applied Surface Science · 2013 · 87 citations

Materials Science, Diamond-like Carbon, Gan Substrate +11

The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

Chengwu Wang, Syuhei KUROKAWA, Toshiro Doi et al. · ECS Journal of Solid State Science and Technology · 2017 · 57 citations

Laser Processing (Laser Material Processing), Engineering, Mechanical Engineering +18

Effect of Pad Groove Designs on the Frictional and Removal Rate Characteristics of ILD CMP

D. Rosales-Yeomans, Toshiro Doi, M. Kinoshita et al. · Journal of The Electrochemical Society · 2004 · 46 citations

Materials Science, Tribological Coating, Engineering +14

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