Hideo Aida

Growth of β-Ga₂O₃ Single Crystals by the Edge-Defined, Film Fed Growth Method

Hideo Aida, Nishiguchi Kengo, Hidetoshi Takeda et al. · Japanese Journal of Applied Physics · 2008 · 669 citations

Materials Science, Dislocation Densities, Engineering +14

Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

Hideo Aida, Toshiro Doi, Hidetoshi Takeda et al. · Current Applied Physics · 2012 · 250 citations

Materials Engineering, Semiconductor Technology, Electrical Engineering +11

Chemical Mechanical Polishing of Gallium Nitride with Colloidal Silica

Hideo Aida, Hidetoshi Takeda, Koji Koyama et al. · Journal of The Electrochemical Society · 2011 · 91 citations

Materials Science, Surface Characterization, Chemical Engineering +11

Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Hideo Aida, Hidetoshi Takeda, Seong‐Woo Kim et al. · Applied Surface Science · 2013 · 87 citations

Materials Science, Diamond-like Carbon, Gan Substrate +11

The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

Chengwu Wang, Syuhei KUROKAWA, Toshiro Doi et al. · ECS Journal of Solid State Science and Technology · 2017 · 57 citations

Laser Processing (Laser Material Processing), Engineering, Mechanical Engineering +18