Concepedia

Hideo Aida

HA

28

Publications

1.6K

Citations

16

H-Index

2004

Active since

Affiliations

Kyushu University(Current)

Aoyama Gakuin University

Kanazawa Institute of Technology

The University of Osaka

Nagaoka University of Technology

Hideo Aida is an author at Kyushu University specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMicrofabricationMicrostructureSurface ScienceMaterial ProcessingMechanical EngineeringCrystalline DefectsMaterials Engineering

Publications per year

2004–2021

28

Publications

28

Growth of β-Ga<sub>2</sub>O<sub>3</sub> Single Crystals by the Edge-Defined, Film Fed Growth Method

Hideo Aida, Nishiguchi Kengo, Hidetoshi Takeda et al. · Japanese Journal of Applied Physics · 2008 · 669 citations

Materials Science, Dislocation Densities, Engineering +14

Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

Hideo Aida, Toshiro Doi, Hidetoshi Takeda et al. · Current Applied Physics · 2012 · 250 citations

Materials Engineering, Semiconductor Technology, Electrical Engineering +11

Chemical Mechanical Polishing of Gallium Nitride with Colloidal Silica

Hideo Aida, Hidetoshi Takeda, Koji Koyama et al. · Journal of The Electrochemical Society · 2011 · 91 citations

Materials Science, Surface Characterization, Chemical Engineering +11

Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Hideo Aida, Hidetoshi Takeda, Seong‐Woo Kim et al. · Applied Surface Science · 2013 · 87 citations

Materials Science, Diamond-like Carbon, Gan Substrate +11

The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

Chengwu Wang, Syuhei KUROKAWA, Toshiro Doi et al. · ECS Journal of Solid State Science and Technology · 2017 · 57 citations

Laser Processing (Laser Material Processing), Engineering, Mechanical Engineering +18

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