Publication | Closed Access
Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials
250
Citations
29
References
2012
Year
Materials EngineeringSemiconductor TechnologyElectrical EngineeringOptical MaterialsEngineeringWide-bandgap SemiconductorUltraprecision CmpOptoelectronic MaterialsApplied PhysicsGan Power DeviceOptoelectronic DevicesMicroelectronicsOptoelectronicsAdvanced Optoelectronics Materials
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