Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

Hideo Aida, Toshiro Doi, Hidetoshi Takeda, Haruji Katakura, Seong‐Woo Kim, Koji Koyama, Tsutomu Yamazaki, Michio Uneda

Current Applied Physics · 2012 · 257 citations · 29 references

Concepts

References

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