Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives - Concepedia

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Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

87

Citations

28

References

2013

Year

Hideo Aida, Hidetoshi Takeda, Seong‐Woo Kim, Natsuko Aota, Koji Koyama, Tsutomu Yamazaki, Toshiro Doi

Applied Surface Science

Materials ScienceDiamond-like CarbonGan SubstrateEngineeringSubsurface DamageCorrosionSurface ScienceApplied PhysicsGan Power DeviceAbrasive ProcessSurface ProcessingAbrasive MachiningMicrostructureDiamond Abrasives

References

	Year	Citations

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