Applied Surface Science · 2013 · 90 citations · 28 references
DentistryMaterials EngineeringMaterials ScienceSemiconductor DevicesSurface ScienceAbrasion ResistanceAbrasive WearSurface DegradationSurface RoughnessSurface TreatmentPolishing ProcessesPolishing-induced Surface DamageSubsurface Damage Reduction
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GaN: Processing, defects, and devices
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