15
Publications
356
Citations
12
H-Index
1986
Active since
Vincent P. Manno is an author at Tufts University specializing in engineering, mechanical engineering, and electronic packaging.
Top concepts
EngineeringMechanical EngineeringElectronic PackagingHeat TransferApplied PhysicsMultiphase FlowMaterial ScienceMicrofabricationThermal EngineeringRefrigeration
Publications per year
1986–2014
15
15
Measurements of Slurry Film Thickness and Wafer Drag during CMP
Jeffrey Lu, Chris Rogers, Vincent P. Manno et al. · Journal of The Electrochemical Society · 2004 · 53 citations
Engineering, Microscopy, Wafer Drag +20
Rows per page
1–5 of 15