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Cabot Microelectronics (United States)

CM

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Publications

155

Citations

4.9K

Authors

28

Location

Aurora, United States

Cabot Microelectronics (United States) is a company institution in Aurora, United States known for materials science, engineering, and materials engineering.

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Publications

155

Cylindrically Confined Diblock Copolymers

P. B. Dobriyal, Hongqi Xiang, Kazuyuki Matsunaga et al. · Macromolecules · 2009 · 184 citations

, , +17

Wear‐Contact Problems and Modeling of Chemical Mechanical Polishing

O. G. Chekina, L. M. Keer, Hongyu Liang · Journal of The Electrochemical Society · 1998 · 127 citations

, , +16

Wear phenomena in chemical mechanical polishing

Hong Liang, F. B. Kaufman, Rubén Sevilla et al. · Wear · 1997 · 109 citations

, , +12

A Model of Copper CMP

Ed Paul, Frank B. Kaufman, V. Brusić et al. · Journal of The Electrochemical Society · 2005 · 90 citations

, , +15

Probable role of abrasion in chemo-mechanical polishing of tungsten

Jorn Larsen-Basse, Hong Liang · Wear · 1999 · 84 citations

, , +14

1–5 of 155

Authors

28

  1. KM
    Kevin Moeggenborg

    Cabot Microelectronics (United States), United States

    30 publications · 299 citations

    9

    h-index

  2. DB
    David Boldridge

    Cabot Microelectronics (United States), United States

    15 publications · 357 citations

    9

    h-index

  3. SA
    Sriram Anjur

    Cabot Microelectronics (United States), United States

    21 publications · 325 citations

    7

    h-index

  4. FS
    Fred Sun

    Cabot Microelectronics (United States), United States

    19 publications · 153 citations

    6

    h-index

  5. JK
    Jaishankar Kasthurirangan

    Cabot Microelectronics (United States), United States

    6 publications · 140 citations

    4

    h-index

1–5 of 28