Concepedia

Fred Sun

FS

4

Publications

125

Citations

4

H-Index

2005

Active since

Affiliations

Cabot Microelectronics (United States)(Current)

Fred Sun is an author at Cabot Microelectronics (United States) specializing in mechanical engineering, materials science, and engineering.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringApplied PhysicsMicrofabricationMicroelectronicsMaterial ProcessingSurface EngineeringChemical EngineeringMaterials Engineering

Publications per year

2005–2013

4

Publications

4

A Model of Copper CMP

Ed Paul, Frank B. Kaufman, V. Brusić et al. · Journal of The Electrochemical Society · 2005 · 90 citations

Engineering, Mechanical Engineering, Wastewater Treatment +22

A Deterministic Semi-Analytical Model for the Contact of a Wafer and a Rough Bi-Layer Pad in CMP

Chengjiao Yu, Zhanjiang Wang, Fred Sun et al. · ECS Journal of Solid State Science and Technology · 2013 · 13 citations · Full text

Engineering, Deterministic Semi-analytical Model, Mechanical Engineering +21

Aggressive Diamond Characterization and Wear Analysis during Chemical Mechanical Planarization

Changhong Wu, Yun Zhuang, Xiaoyan Liao et al. · ECS Journal of Solid State Science and Technology · 2012 · 12 citations

Engineering, Mechanical Engineering, Material Processing +17

ILD CMP with Silica Abrasive Particles: Interfacial Removal Kinetics and Effect of Pad Surface Textures

Shoutian Li, Greg Gaudet, Fred Sun et al. · Journal of The Electrochemical Society · 2010 · 10 citations

Engineering, Pad Surface Textures, Mechanical Engineering +20

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