Fred Sun - Concepedia

Author

Fred Sun

Also Known As

Fred F. Sun, Fred Sun, Sun, Fred

Publications

148

Citations

H-Index

Concepts

All Affiliations

Fred Sun is an author at Cabot Microelectronics (United States) specializing in mechanical engineering, materials science, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	125
2	Applied Physics	3	3	115
3	Chemical Engineering	2	2	100
4	Materials Engineering	2	2	102
5	Electrical Engineering	1	1	13

Fred Sun

Publications

125

Citations

H-Index

Page 1

	Year	Citations
A Model of Copper CMP Ed Paul, Frank B. Kaufman, V. Brusić, Journal of The Electrochemical Society EngineeringMechanical EngineeringWastewater TreatmentCmp ModelAbrasive Process	2005	90
A Deterministic Semi-Analytical Model for the Contact of a Wafer and a Rough Bi-Layer Pad in CMP Chengjiao Yu, Zhanjiang Wang, Fred Sun, ECS Journal of Solid State Science and Technology EngineeringDeterministic Semi-analytical ModelMechanical EngineeringComputational MechanicsFast Fourier Transform	2013	13
Aggressive Diamond Characterization and Wear Analysis during Chemical Mechanical Planarization Changhong Wu, Yun Zhuang, Xiaoyan Liao, ECS Journal of Solid State Science and Technology EngineeringMechanical EngineeringMaterial ProcessingWear-resistant MaterialMaterials Science	2012	12
ILD CMP with Silica Abrasive Particles: Interfacial Removal Kinetics and Effect of Pad Surface Textures Shoutian Li, Greg Gaudet, Fred Sun, Journal of The Electrochemical Society EngineeringPad Surface TexturesMechanical EngineeringSurface NanotechnologySilica Abrasive Particles	2010	10

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