Concepedia

Ed Paul

EP

Statistics

Publications

7

Citations

614

H-Index

7

Active since

1996

Affiliations

Stockton University(Current)

Cabot Microelectronics (United States)

Ed Paul is an author at Stockton University specializing in mechanical polishing, materials science, and materials engineering.

Publications per year

1996–2007

7

Publications

7

Chemical aspects of tool wear in single point diamond turning

Ed Paul, C. J. Evans, Anthony Mangamelli et al. · Precision Engineering · 1996 · 324 citations

Engineering, Materials Engineering, Materials Science +11

A Model of Copper CMP

Ed Paul, Frank B. Kaufman, V. Brusić et al. · Journal of The Electrochemical Society · 2005 · 90 citations

Engineering, Chemical Engineering, Chemistry +15

A Model of Chemical Mechanical Polishing

Ed Paul · Journal of The Electrochemical Society · 2001 · 78 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Application of a CMP Model to Tungsten CMP

Ed Paul · Journal of The Electrochemical Society · 2001 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +12

A Model of Chemical Mechanical Polishing

Ed Paul · Journal of The Electrochemical Society · 2002 · 26 citations

Engineering, Materials Engineering, Materials Science +12

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