Concepedia

Greg Gaudet

GG

3

Publications

42

Citations

3

H-Index

2010

Active since

Affiliations

Cabot Microelectronics (United States)(Current)

Greg Gaudet is an author at Cabot Microelectronics (United States) specializing in engineering, mineral processing, and microfabrication.

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Publications per year

2010–2017

3

Publications

3

ILD CMP with Silica Abrasive Particles: Effect of Pore Size of CMP Pad on Removal Rate Profiles

Shoutian Li, Greg Gaudet, J. S. Arya Nair · ECS Journal of Solid State Science and Technology · 2013 · 16 citations

, , +20

Capturing Wind With Thermal Energy Storage—Summerside’s Smart Grid Approach

Steven Wong, Greg Gaudet, Louis-Philippe Proulx · IEEE Power and Energy Technology Systems Journal · 2017 · 16 citations

, , +13

ILD CMP with Silica Abrasive Particles: Interfacial Removal Kinetics and Effect of Pad Surface Textures

Shoutian Li, Greg Gaudet, Fred Sun et al. · Journal of The Electrochemical Society · 2010 · 10 citations

, , +20

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