Concepedia

Mechanical Polishing

Mechanical Polishing is a surface preparation technique that involves the controlled removal of material from a specimen's surface through abrasive cutting actions to achieve a smooth, reflective finish, distinguished from other polishing methods by its reliance on physical abrasion rather than chemical or electrochemical processes.

1.5K

Publications

59.6K

Citations

4.7K

Authors

926

Institutions

Publications per year

2017–2026

445

Parents

Publications

1.5K

Material removal mechanism in chemical mechanical polishing: theory and modeling

Jianfeng Luo, David Dornfeld · IEEE Transactions on Semiconductor Manufacturing · 2001 · 641 citations

, , +16

Controlling threading dislocation densities in Ge on Si using graded SiGe layers and chemical-mechanical polishing

M. T. Currie, Srikanth Samavedam, T. A. Langdo et al. · Applied Physics Letters · 1998 · 551 citations

, , +17

Bottom-up approach for carbon nanotube interconnects

Jun Li, Qi Ye, Alan M. Cassell et al. · Applied Physics Letters · 2003 · 520 citations · Full text

, , +17

Influence of Copper Morphology in Forming Nucleation Seeds for Graphene Growth

Gang Han, Fethullah Güneş, Jung Jun Bae et al. · Nano Letters · 2011 · 399 citations

, , +17

Performance and analysis of recording microhardness tests

F. Fröhlich, P. Grau, Wolfgang Grellmann · physica status solidi (a) · 1977 · 350 citations

, , +17

1–5 of 1.5K

Authors

4.7K

  1. SV
    S. V. Babu

    Clarkson University, United States

    38 publications · 1.8K citations

    26

    h-index

  2. ZZ
    Zhenyu Zhang

    Dalian University of Technology, China

    36 publications · 2.6K citations

    26

    h-index

  3. XN
    Xinhuan Niu

    Hebei University of Technology, China

    25 publications · 944 citations

    19

    h-index

  4. LJ
    Liang Jiang

    Central South University, China

    23 publications · 716 citations

    17

    h-index

  5. JL
    Jianbin Luo

    Tsinghua University, China

    19 publications · 845 citations

    17

    h-index

1–5 of 4.7K

Institutions

926

  1. Dalian University of Technology

    Dalian, China

    38 h-index

    355 publications

    20.5K citations

  2. Tsinghua University

    Beijing, China

    36 h-index

    288 publications

    13.7K citations

  3. Clarkson University

    Potsdam, United States

    30 h-index

    154 publications

    7.3K citations

  4. Hebei University of Technology

    Tianjin, China

    28 h-index

    367 publications

    12.9K citations

  5. Chinese Academy of Sciences

    Beijing, China

    26 h-index

    151 publications

    6.2K citations

  6. Materials Processing (United States)

    Irving, United States

    26 h-index

    92 publications

    4.4K citations

  7. Tianjin University of Technology

    Tianjin, China

    25 h-index

    283 publications

    10.4K citations

  8. University of Florida

    Gainesville, United States

    19 h-index

    85 publications

    4.4K citations

1–8 of 926

Venues

  1. Applied Surface Science

    78 publications · 5K citations

    47

    h-index

  2. Journal of The Electrochemical Society

    JES · 136 publications · 5.6K citations

    43

    h-index

  3. ECS Journal of Solid State Science and Technology

    JSS · 79 publications · 2K citations

    27

    h-index

  4. Thin Solid Films

    40 publications · 1.8K citations

    24

    h-index

  5. Microelectronic Engineering

    43 publications · 1.3K citations

    24

    h-index

1–5