Concepedia

Sriram Anjur

SA

6

Publications

298

Citations

6

H-Index

1997

Active since

Affiliations

Cabot Microelectronics (United States)(Current)

Tufts University

Intel (United States)

University of Arizona

Sriram Anjur is an author at Cabot Microelectronics (United States) specializing in materials science, engineering, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMicroscopyApplied PhysicsSurface ScienceMicrofabricationElectronic PackagingMicroelectronicsSurface Polishing

Publications per year

1997–2010

6

Publications

6

Wear phenomena in chemical mechanical polishing

Hong Liang, F. B. Kaufman, Rubén Sevilla et al. · Wear · 1997 · 107 citations

Materials Science, Engineering, Surface Polishing +5

Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP

Edward E. Remsen, Sriram Anjur, David Boldridge et al. · Journal of The Electrochemical Society · 2006 · 78 citations

Engineering, Microscopy, Mechanical Engineering +18

Measurements of Slurry Film Thickness and Wafer Drag during CMP

Jeffrey Lu, Chris Rogers, Vincent P. Manno et al. · Journal of The Electrochemical Society · 2004 · 53 citations

Engineering, Microscopy, Wafer Drag +20

Investigating Effect of Conditioner Aggressiveness on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization through Confocal Microscopy and Dual Emission Ultraviolet-Enhanced Fluorescence Imaging

Ting Sun, Len Borucki, Yun Zhuang et al. · Japanese Journal of Applied Physics · 2010 · 31 citations

Engineering, Microscopy, Conditioner Aggressiveness +24

In Situ Measurement of Pressure and Friction during CMP of Contoured Wafers

Alicia Scarfo, Vincent P. Manno, Chris Rogers et al. · Journal of The Electrochemical Society · 2005 · 18 citations

Engineering, Mechanical Engineering, Nanotribology +20

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