J. F. Marchiando

Scanning capacitance microscopy measurements and modeling: Progress towards dopant profiling of silicon

Joseph J. Kopanski, J. F. Marchiando, Jeremiah R. Lowney · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 107 citations

Scanning Capacitance Microscope, Engineering, Microscopy +19

Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors

Joseph J. Kopanski, J. F. Marchiando, Jeremiah R. Lowney · Materials Science and Engineering B · 1997 · 42 citations

Semiconductors, Electrical Engineering, Engineering +7

Scanning capacitance microscopy measurement of two-dimensional dopant profiles across junctions

Joseph J. Kopanski, J. F. Marchiando, D.W. Berning et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 41 citations

Device Modeling, Scm Images, Engineering +14

Model database for determining dopant profiles from scanning capacitance microscope measurements

J. F. Marchiando, Joseph J. Kopanski, Jeremiah R. Lowney · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 38 citations

Engineering, Measurement, Microscopy +26

Carrier concentration dependence of the scanning capacitance microscopy signal in the vicinity of p–n junctions

Joseph J. Kopanski, J. F. Marchiando, Brian G. Rennex · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 33 citations

Engineering, Microscopy, Charge Transport +17