Process Variation Characterization

Process Variation Characterization is a systematic methodology within MEMS testing that identifies and quantifies deviations in fabrication parameters across production batches to assess their impact on device performance and reliability.

414

Publications

16.3K

Citations

1.5K

Authors

363

Institutions

Publications per year

2017–2026

48

Authors

1.5K

  1. SN
    Sani Nassif

    IBM Research - Austin, United States

    14 publications · 1.3K citations

    14

    h-index

  2. DS
    Duane S. Boning

    Massachusetts Institute of Technology, United States

    13 publications · 574 citations

    12

    h-index

  3. KA
    Kanak Agarwal

    IBM Research - Austin, United States

    9 publications · 585 citations

    9

    h-index

  4. CJ
    Costas J. Spanos

    University of California, Berkeley, United States

    7 publications · 193 citations

    7

    h-index

  5. JX
    Jinjun Xiong

    IBM Research - Thomas J. Watson Research Center, United States

    7 publications · 391 citations

    7

    h-index

1–5 of 1.5K

Venues

  1. IEEE Transactions on Semiconductor Manufacturing

    27 publications · 1.6K citations

    20

    h-index

  2. 14

    h-index

  3. 14

    h-index

  4. IEEE Transactions on Electron Devices

    10 publications · 774 citations

    10

    h-index

  5. 10

    h-index

1–5