M.N. Séméria

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Publications

Citations

1.2K

H-Index

Active since

1999

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

CEA Grenoble

Direction de la Recherche Technologique

Centre National de la Recherche Scientifique

Laboratoire d'Électronique des Technologies de l'Information

M.N. Séméria is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in materials science, materials engineering, and engineering.

Publications per year

1999–2005

Publications

Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O

L.G. Gosset, J.-F. Damlencourt, O. Renault et al. · Journal of Non-Crystalline Solids · 2002 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +11

Engineering strained silicon on insulator wafers with the Smart CutTM technology

B. Ghyselen, Jean‐Michel Hartmann, T. Ernst et al. · Solid-State Electronics · 2004 · 117 citations

Engineering, Materials Engineering, Materials Science +14

SiGe growth kinetics and doping in reduced pressure-chemical vapor deposition

Jean‐Michel Hartmann, V. Loup, G. Rolland et al. · Journal of Crystal Growth · 2002 · 95 citations

Engineering, Materials Engineering, Materials Science +14

How far will silicon nanocrystals push the scaling limits of NVMs technologies?

B. De Salvo, C. Gerardi, S. Lombardo et al. · 2004 · 75 citations

Engineering, Electrical Engineering, Materials Science +17

XPS, Raman spectroscopy, X‐ray diffraction, specular X‐ray reflectivity, transmission electron microscopy and elastic recoil detection analysis of emissive carbon film characterization

A. Ermolieff, Amal Chabli, F. Pierre et al. · Surface and Interface Analysis · 2001 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +13

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