Publication | Closed Access
SiGe growth kinetics and doping in reduced pressure-chemical vapor deposition
93
Citations
47
References
2002
Year
Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsSige Growth KineticsSemiconductor Device FabricationVacuum DeviceChemical DepositionSilicon On InsulatorChemical Vapor Deposition
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