Mark Kelling - Concepedia

Author

Mark Kelling

Also Known As

M. Kelling, Mark C. Kelling, Mark Kelling

Publications

269

Citations

H-Index

Concepts

All Affiliations

Mark Kelling is an author at IBM (United States) specializing in microelectronics, engineering, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	242
2	Applied Physics	4	4	225
3	Electrical Engineering	4	4	177
4	Computer Engineering	3	3	197
5	Education	2	2	82

Mark Kelling

Publications

242

Citations

H-Index

Page 1

	Year	Citations
High Performance 45-nm SOI Technology with Enhanced Strain, Porous Low-k BEOL, and Immersion Lithography P. Agnello, T. Ivers, C. Warm, EngineeringVlsi DesignEnhanced StrainPorous Low-k BeolIntegrated Circuits	2006	115
A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM Alok Vaid, Bin Bin Yan, Yun Tao Jiang, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMeasurementMicroscopyEducation	2011	65
Performance of tri-layer process required for 22 nm and beyond Yayi Wei, Martin Glodde, Hakeem Yusuff, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringHigh Silicon Content	2011	23
A 45 nm CMOS node Cu/Low-k/ Ultra Low-k PECVD SiCOH (k=2.4) BEOL Technology S. Sankaran, S. Arai, R. Augur, Materials ScienceMaterials EngineeringElectrical EngineeringBeol TechnologyEngineering	2006	22
Hybrid metrology solution for 1X node technology Alok Vaid, Alexander Elia, Mark Kelling, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMeasurementEducationComputer-aided Design	2012	17

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