Concepedia

Yayi Wei

YW

34

Publications

714

Citations

16

H-Index

1997

Active since

Affiliations

Chinese Academy of Sciences(Current)

University of Chinese Academy of Sciences

Institute of Microelectronics

Beijing Institute of Technology

University at Albany, State University of New York

Yayi Wei is an author at Chinese Academy of Sciences specializing in engineering, computer engineering, and applied physics.

ORCID

Top concepts

Publications per year

1997–2024

34

Publications

34

Evaluation of EUV resist materials for use at the 32 nm half-pitch node

Thomas I. Wallow, Craig Higgins, Robert L. Brainard et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 107 citations

, , +24

An exploratory study of the conduction mechanism of hydrogenated nanocrystalline silicon films

Yuliang He, Yayi Wei, Zheng Guozhen et al. · Journal of Applied Physics · 1997 · 65 citations

, , +21

Enhanced ultraviolet photoconductivity in semiconducting ZnGa2O4 thin films

Yong Eui Lee, D. P. Norton, J. D. Budai et al. · Journal of Applied Physics · 2001 · 41 citations

, , +13

Chemically amplified resists resolving 25 nm 1:1 line: space features with EUV lithography

James W. Thackeray, Roger A. Nassar, Robert L. Brainard et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 30 citations

, , +20

Pathway to sub-30nm Resolution in EUV Lithography

James W. Thakerlay, Roger A. Nassar, Kathleen Spear-Alfonso et al. · Journal of Photopolymer Science and Technology · 2007 · 29 citations · Full text

, , +16

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