Concepedia

Alexander Elia

AE

Statistics

Publications

4

Citations

72

H-Index

4

Active since

2012

Affiliations

GlobalFoundries (United States)(Current)

Nova Measuring Instruments (Israel)

Alexander Elia is an author at GlobalFoundries (United States) specializing in metrology, engineering, and dimensional metrology.

Top concepts

Publications per year

2012–2018

4

Publications

4

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Dhairya Dixit, Nick Keller, Yevgeny Lifshitz et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 24 citations

Hybrid metrology solution for 1X node technology

Alok Vaid, Alexander Elia, Mark Kelling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations

, , +21

Hybrid metrology: from the lab into the fab

Alok Vaid, Alexander Elia, Givantha Iddawela et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 17 citations

, , +20

Advanced applications of scatterometry based optical metrology

Dhairya Dixit, Nick Keller, Taher Kagalwala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

1–4 of 4