Nick Keller

Perspective: Optical measurement of feature dimensions and shapes by scatterometry

Alain C. Diebold, Andy Antonelli, Nick Keller · APL Materials · 2018 · 68 citations · Full text

Optical Materials, Engineering, Statistical Shape Analysis +24

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Dhairya Dixit, Nick Keller, Yevgeny Lifshitz et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 24 citations

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Dhairya Dixit, Samuel O’Mullane, Sravan Sunkoju et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 23 citations · Full text

Mueller Matrix, Optical Materials, Engineering +20

Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry

Madhulika Korde, Subhadeep Kal, Cheryl Alix et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2020 · 21 citations

Selective Etching, Engineering, Microscopy +24

Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

Dhairya Dixit, Avery Green, Erik R. Hosler et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 20 citations