Concepedia

Yevgeny Lifshitz

YL

Statistics

Publications

3

Citations

54

H-Index

3

Active since

2012

Affiliations

GlobalFoundries (United States)(Current)

Yevgeny Lifshitz is an author at GlobalFoundries (United States) specializing in dimensional metrology, critical dimension metrology, and optical metrology.

Publications per year

2012–2018

3

Publications

3

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Dhairya Dixit, Nick Keller, Yevgeny Lifshitz et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 25 citations

, , +17

Advanced applications of scatterometry based optical metrology

Dhairya Dixit, Nick Keller, Taher Kagalwala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 16 citations

, , +17

AFM study of hydrophilicity on acetaminophen crystals

Kalyana C. Pingali, Troy Shinbrot, Alberto M. Cuitiño et al. · International Journal of Pharmaceutics · 2012 · 13 citations

, , +13

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