Concepedia

Dhairya Dixit

DD

Statistics

Publications

6

Citations

108

H-Index

6

Active since

2014

Affiliations

GlobalFoundries (United States)(Current)

Nanosys (United States)

Center for Nanoscale Science and Technology

Dhairya Dixit is an author at GlobalFoundries (United States) specializing in optical properties, physics, and instrumentation.

Top concepts

Publications per year

2014–2018

6

Publications

6

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Dhairya Dixit, Nick Keller, Yevgeny Lifshitz et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 24 citations

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Dhairya Dixit, Samuel O’Mullane, Sravan Sunkoju et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 23 citations · Full text

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Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

Dhairya Dixit, Avery Green, Erik R. Hosler et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 20 citations

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Dhairya Dixit, Vimal Kamineni, Richard A. Farrell et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 17 citations · Full text

Advanced applications of scatterometry based optical metrology

Dhairya Dixit, Nick Keller, Taher Kagalwala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

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