Dhairya Dixit

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Dhairya Dixit, Nick Keller, Yevgeny Lifshitz et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 25 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Dhairya Dixit, Samuel O’Mullane, Sravan Sunkoju et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 23 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

Dhairya Dixit, Avery Green, Erik R. Hosler et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Dhairya Dixit, Vimal Kamineni, Richard A. Farrell et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 17 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Advanced applications of scatterometry based optical metrology

Dhairya Dixit, Nick Keller, Taher Kagalwala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 16 citations

Engineering, Manufacturing Engineering, Materials Science +17