Concepedia

Taher Kagalwala

TK

Statistics

Publications

4

Citations

71

H-Index

4

Active since

2014

Affiliations

GlobalFoundries (United States)(Current)

Taher Kagalwala is an author at GlobalFoundries (United States) specializing in applied physics, computer engineering, and electrical engineering.

ORCID

Top concepts

Publications per year

2014–2018

4

Publications

4

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Dhairya Dixit, Nick Keller, Yevgeny Lifshitz et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 24 citations

Leveraging advanced data analytics, machine learning, and metrology models to enable critical dimension metrology solutions for advanced integrated circuit nodes

Narender Rana, Yunlin Zhang, Taher Kagalwala et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 23 citations

, , +32

Advanced applications of scatterometry based optical metrology

Dhairya Dixit, Nick Keller, Taher Kagalwala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

A Combined Gas Cluster Ion Beam (GCIB) and Chemical-Mechanical Polish (CMP) Planarization Scheme for Tungsten Replacement Metal Gate (W-RMG)

Wei‐Tsu Tseng, Justin Long, Kaushik Mohan et al. · ECS Journal of Solid State Science and Technology · 2016 · 10 citations

, , +20

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