Concepedia

Kaushik Mohan

KM

Statistics

Publications

2

Citations

27

H-Index

2

Active since

2016

Affiliations

GlobalFoundries (United States)(Current)

Kaushik Mohan is an author at GlobalFoundries (United States) specializing in materials engineering, electronic packaging, and applied physics.

Top concepts

Publications per year

2016–2016

2

Publications

2

A Microreplicated Pad for Tungsten Chemical-Mechanical Planarization

Wei‐Tsu Tseng, Kaushik Mohan, Ricky Hull et al. · ECS Journal of Solid State Science and Technology · 2016 · 17 citations · Full text

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A Combined Gas Cluster Ion Beam (GCIB) and Chemical-Mechanical Polish (CMP) Planarization Scheme for Tungsten Replacement Metal Gate (W-RMG)

Wei‐Tsu Tseng, Justin Long, Kaushik Mohan et al. · ECS Journal of Solid State Science and Technology · 2016 · 10 citations

, , +20

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