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Nova Measuring Instruments (Israel)

NM

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Publications

115

Citations

1.6K

Authors

19

Location

Rehovot, Israel

Nova Measuring Instruments (Israel) is a company institution in Rehovot, Israel known for engineering, metrology, and semiconductor metrology.

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Publications

115

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Alok Vaid, Bin Bin Yan, Yun Tao Jiang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 65 citations

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An Immunohistochemical Study of the Secretory Immune System in Human Fetal Membranes and Decidua of the First Trimester of Pregnancy

Pavel Gurevich, Asher Elhayany, Herzl Ben‐Hur et al. · American Journal of Reproductive Immunology · 2003 · 24 citations

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New Method of Measuring Linear Dichroism in the Ultraviolet: Application to Helical Polymers

J. H. Jaffe, Halina Jaffe, Kurt Rosenheck · Review of Scientific Instruments · 1967 · 24 citations

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Line edge roughness detection using deep UV light scatterometry

Barak Yaakobovitz, Yoel Cohen, Yoed Tsur · Microelectronic Engineering · 2006 · 24 citations

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Hybrid metrology: from the lab into the fab

Alok Vaid, Alexander Elia, Givantha Iddawela et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 18 citations

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1–5 of 115

Authors

19

  1. IT
    Igor Turovets

    Nova Measuring Instruments (Israel), Israel

    55 publications · 462 citations

    12

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  2. CB
    Cornel Bozdog

    Nova Measuring Instruments (Israel), Israel

    47 publications · 409 citations

    9

    h-index

  3. RK
    Roy Koret

    Nova Measuring Instruments (Israel), Israel

    31 publications · 268 citations

    7

    h-index

  4. SW
    Shay Wolfling

    Nova Measuring Instruments (Israel), Israel

    22 publications · 138 citations

    7

    h-index

  5. SG
    Stéphane Godny

    Nova Measuring Instruments (Israel), Israel

    10 publications · 240 citations

    5

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1–5 of 19