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Publications
112
Citations
1.5K
Authors
19
Location
Rehovot, Israel
Nova Measuring Instruments (Israel) is a company institution in Rehovot, Israel known for engineering, microfabrication, and applied physics.
Top concepts
EngineeringMicrofabricationApplied PhysicsMicroscopyInstrumentationMicroelectronicsPhotonic MetrologyMetrologyComputer EngineeringOptical Metrology
A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM
Alok Vaid, Bin Bin Yan, Yun Tao Jiang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 65 citations
Engineering, Electron-beam Lithography, Measurement +19
An Immunohistochemical Study of the Secretory Immune System in Human Fetal Membranes and Decidua of the First Trimester of Pregnancy
Pavel Gurevich, Asher Elhayany, Herzl Ben‐Hur et al. · American Journal of Reproductive Immunology · 2003 · 24 citations
New Method of Measuring Linear Dichroism in the Ultraviolet: Application to Helical Polymers
J. H. Jaffe, Halina Jaffe, Kurt Rosenheck · Review of Scientific Instruments · 1967 · 24 citations
Optical Materials, Engineering, Chemistry +25
Line edge roughness detection using deep UV light scatterometry
Barak Yaakobovitz, Yoel Cohen, Yoed Tsur · Microelectronic Engineering · 2006 · 24 citations
Engineering, Image Analysis, Machine Vision +2
Hybrid metrology solution for 1X node technology
Alok Vaid, Alexander Elia, Mark Kelling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations
Engineering, Electron-beam Lithography, Measurement +21
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Nova Measuring Instruments (Israel), Israel
51 publications · 453 citations
12
h-index
45 publications · 405 citations
9
30 publications · 249 citations
6
21 publications · 123 citations
15 publications · 82 citations
5
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