Roy Koret

First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers

S. Subramanian, M. Reza Hosseini, T. Chiarella et al. · 2020 · 109 citations

Engineering, N14 Platform, Interconnect (Integrated Circuits) +16

Hybrid metrology solution for 1X node technology

Alok Vaid, Alexander Elia, Mark Kelling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations

Engineering, Electron-beam Lithography, Measurement +21

Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement

Daniel Schmidt, Aron Cepler, Curtis Durfee et al. · IEEE Transactions on Semiconductor Manufacturing · 2022 · 16 citations · Full text

Engineering, Microscopy, Machine Learning Algorithms +17

Metrology of thin resist for high NA EUVL

Gian F. Lorusso, Christophe Béral, Janusz Bogdanowicz et al. · Metrology, Inspection, and Process Control XXXVI · 2022 · 14 citations

OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

Daniel Schmidt, Curtis Durfee, S. Pancharatnam et al. · Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV · 2021 · 11 citations

Engineering, Microscopy, Optical Testing +19