Gian F. Lorusso

Optical spectra and photoluminescence of C60 thin films

V. Capozzi, G. Casamassima, Gian F. Lorusso et al. · Solid State Communications · 1996 · 76 citations

Optical Materials, Engineering, Photoluminescence +5

MEPHISTO: Performance tests of a novel synchrotron imaging photoelectron spectromicroscope

Gelsomina De Stasió, M. Capozi, Gian F. Lorusso et al. · Review of Scientific Instruments · 1998 · 57 citations · Full text

Engineering, Electron Optics System, Novel Synchrotron +20

Unbiased roughness measurements: Subtracting out SEM effects

Gian F. Lorusso, Vito Rutigliani, Frieda Van Roey et al. · Microelectronic Engineering · 2018 · 49 citations

Engineering, Nondestructive Testing, Measurement +8

Need for LWR metrology standardization: the imec roughness protocol

Gian F. Lorusso, Takumichi Sutani, Vito Rutigliani et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 48 citations

Measurement Theory, Engineering, Measurement +18

Extreme ultraviolet lithography at IMEC: Shadowing compensation and flare mitigation strategy

Gian F. Lorusso, A. M. Goethals, R. Jonckheere et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 30 citations

Engineering, Extreme Ultraviolet Lithography, Beam Lithography +12