Gian F. Lorusso

Optical spectra and photoluminescence of C60 thin films

V. Capozzi, G. Casamassima, Gian F. Lorusso et al. · Solid State Communications · 1996 · 76 citations

Natural Sciences, Chemistry, Materials Science +14

MEPHISTO: Performance tests of a novel synchrotron imaging photoelectron spectromicroscope

Gelsomina De Stasió, M. Capozi, Gian F. Lorusso et al. · Review of Scientific Instruments · 1998 · 58 citations · Full text

Natural Sciences, Chemistry, Instrumentation +9

Unbiased roughness measurements: Subtracting out SEM effects

Gian F. Lorusso, Vito Rutigliani, Frieda Van Roey et al. · Microelectronic Engineering · 2018 · 50 citations

Engineering, Earth Sciences, Metrology +9

Need for LWR metrology standardization: the imec roughness protocol

Gian F. Lorusso, Takumichi Sutani, Vito Rutigliani et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 49 citations

Engineering, Materials Engineering, Materials Science +17

Extreme ultraviolet lithography at IMEC: Shadowing compensation and flare mitigation strategy

Gian F. Lorusso, A. M. Goethals, R. Jonckheere et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 30 citations

Engineering, Manufacturing Engineering, Design Automation +10