Takumichi Sutani

Need for LWR metrology standardization: the imec roughness protocol

Gian F. Lorusso, Takumichi Sutani, Vito Rutigliani et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 49 citations

Engineering, Materials Engineering, Materials Science +17

The need for LWR metrology standardization: the imec roughness protocol

Alain Moussa, Gian F. Lorusso, Takumichi Sutani et al. · 2018 · 24 citations

Engineering, Materials Engineering, Materials Science +17

A new matching engine between design layout and SEM image of semiconductor device

Hidetoshi Morokuma, Akiyuki Sugiyama, Yasutaka Toyoda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 18 citations

Engineering, Electrical Engineering, Manufacturing Engineering +11

Predissociation of the Rydberg states of CO: State specific predissociation to the triplet channel

Akihiro Okazaki, Takayuki Ebata, Takumichi Sutani et al. · The Journal of Chemical Physics · 1998 · 16 citations · Full text

Natural Sciences, Chemistry, Physics +10

Enabling CD SEM metrology for 5nm technology node and beyond

Gian F. Lorusso, Takeyoshi Ohashi, Astuko Yamaguchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17