Vito Rutigliani

Unbiased roughness measurements: Subtracting out SEM effects

Gian F. Lorusso, Vito Rutigliani, Frieda Van Roey et al. · Microelectronic Engineering · 2018 · 49 citations

Engineering, Nondestructive Testing, Measurement +8

Need for LWR metrology standardization: the imec roughness protocol

Gian F. Lorusso, Takumichi Sutani, Vito Rutigliani et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 48 citations

Measurement Theory, Engineering, Measurement +18

The need for LWR metrology standardization: the imec roughness protocol

Alain Moussa, Gian F. Lorusso, Takumichi Sutani et al. · 2018 · 24 citations

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

Jean‐François de Marneffe, L. Zhang, Markus Heyne et al. · Journal of Applied Physics · 2015 · 23 citations

Engineering, Vacuum Ultra-violet Damage, Nanoporous Material +17

EUV photoresist patterning characterization for imec N7/N5 technology

Danilo De Simone, Vito Rutigliani, Gian F. Lorusso et al. · 2018 · 23 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +21