Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents

Annelies Delabie, Matty Caymax, Benjamin Groven, +13

Chemical Communications

Materials EngineeringMaterials ScienceChemical EngineeringTransition Metal ChalcogenidesEngineering +11

Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S

Benjamin Groven, Markus Heyne, Ankit Nalin Mehta, +12

Chemistry of Materials

EngineeringTwo-dimensional MaterialsTransition Metal DichalcogenidesChemical DepositionPlasma Processing +15

Controlled Sulfurization Process for the Synthesis of Large Area MoS₂ Films and MoS₂/WS₂ Heterostructures

Daniele Chiappe, Inge Asselberghs, Surajit Sutar, +15

Advanced Materials Interfaces

Large AreaEngineeringTwo-dimensional MaterialsSolid-state ChemistryChemistry +15

Multilayer MoS₂ growth by metal and metal oxide sulfurization

Markus Heyne, Daniele Chiappe, Johan Meersschaut, +9

Journal of Materials Chemistry C

Materials ScienceMaterials EngineeringOxide HeterostructuresMaterial AnalysisEngineering +13

Highly efficient and stable MoS₂FETs with reversible n-doping using a dehydrated poly(vinyl-alcohol) coating

César Javier Lockhart de la Rosa, Amirhasan Nourbakhsh, Markus Heyne, +5

Nanoscale

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Daniil Marinov, Jean‐François de Marneffe, Quentin Smets, +14

npj 2D Materials and Applications

WS<inf>2</inf> transistors on 300 mm wafers with BEOL compatibility

T. Schram, Quentin Smets, Benjamin Groven, +15

Materials ScienceSemiconductorsElectrical EngineeringMm Pilot LineEngineering +12

Improved Plasma Resistance for Porous Low-k Dielectrics by Pore Stuffing Approach

Liping Zhang, Jean‐François de Marneffe, Markus Heyne, +7

ECS Journal of Solid State Science and Technology

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

Jean‐François de Marneffe, L. Zhang, Markus Heyne, +9

Journal of Applied Physics

EngineeringVacuum Ultra-violet DamageNanoporous MaterialGlass MaterialVacuum Device +15

Two-dimensional WS₂nanoribbon deposition by conversion of pre-patterned amorphous silicon

Markus Heyne, Jean‐François de Marneffe, Annelies Delabie, +5

Nanotechnology