Concepedia

Benjamin Groven

BG

24

Publications

940

Citations

18

H-Index

2014

Active since

Affiliations

University of Huddersfield

Benjamin Groven is an author at IMEC specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceNanoelectronicsElectrical EngineeringMicroelectronicsNanotechnologyCondensed Matter PhysicsChemistry

Publications per year

2014–2024

24

Publications

24

Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper

Liang Wen, Philippe Roussel, Olalla Varela Pedreira et al. · ACS Applied Materials & Interfaces · 2016 · 138 citations

Low temperature deposition of 2D WS<sub>2</sub> layers from WF<sub>6</sub> and H<sub>2</sub>S precursors: impact of reducing agents

Annelies Delabie, Matty Caymax, Benjamin Groven et al. · Chemical Communications · 2015 · 79 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> from WF<sub>6</sub>, H<sub>2</sub> Plasma, and H<sub>2</sub>S

Benjamin Groven, Markus Heyne, Ankit Nalin Mehta et al. · Chemistry of Materials · 2017 · 78 citations · Full text

Engineering, Two-dimensional Materials, Transition Metal Dichalcogenides +17

Two-Dimensional Crystal Grain Size Tuning in WS<sub>2</sub> Atomic Layer Deposition: An Insight in the Nucleation Mechanism

Benjamin Groven, Ankit Nalin Mehta, H. Bender et al. · Chemistry of Materials · 2018 · 72 citations · Full text

Engineering, Crystal Growth Technology, Two-dimensional Materials +21

Impact of device scaling on the electrical properties of MoS2 field-effect transistors

Goutham Arutchelvan, Quentin Smets, Devin Verreck et al. · Scientific Reports · 2021 · 72 citations · Full text

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