Concepedia

Benjamin Groven

BG

Statistics

Publications

29

Citations

1.1K

H-Index

19

Active since

2014

Affiliations

IMEC(Current)

Imec the Netherlands

University of Huddersfield

Benjamin Groven is an author at IMEC specializing in materials science, electronic materials, and materials engineering.

Publications per year

2014–2025

29

Publications

29

Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper

Liang Wen, Philippe Roussel, Olalla Varela Pedreira et al. · ACS Applied Materials & Interfaces · 2016 · 145 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Ultra-scaled MOCVD MoS<sub>2</sub> MOSFETs with 42nm contact pitch and 250µA/µm drain current

Quentin Smets, Goutham Arutchelvan, Julien Jussot et al. · 2019 · 84 citations

Engineering, Electrical Engineering, Materials Science +17

Low temperature deposition of 2D WS<sub>2</sub> layers from WF<sub>6</sub> and H<sub>2</sub>S precursors: impact of reducing agents

Annelies Delabie, Matty Caymax, Benjamin Groven et al. · Chemical Communications · 2015 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> from WF<sub>6</sub>, H<sub>2</sub> Plasma, and H<sub>2</sub>S

Benjamin Groven, Markus Heyne, Ankit Nalin Mehta et al. · Chemistry of Materials · 2017 · 80 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Two-Dimensional Crystal Grain Size Tuning in WS<sub>2</sub> Atomic Layer Deposition: An Insight in the Nucleation Mechanism

Benjamin Groven, Ankit Nalin Mehta, H. Bender et al. · Chemistry of Materials · 2018 · 77 citations · Full text

Engineering, Materials Engineering, Physics +9

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