Concepedia

Author

L. Zhang

IMEC

Also Known As

L. Zhang

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Publications

23

Citations

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H-Index

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IMEC
LZ

About

L. Zhang is an author at IMEC specializing in damage mitigation, materials engineering, and electrical insulation.

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Engineering

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Applied Physics

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Materials Engineering

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Materials Science

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Nanomaterials

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L. Zhang

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1

Publications

23

Citations

1

H-Index

YearCitations

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

Jean‐François de Marneffe, L. Zhang, Markus Heyne,

Journal of Applied Physics

2015

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