Concepedia

L. Zhang

LZ

1

Publications

23

Citations

1

H-Index

2015

Active since

Affiliations

IMEC(Current)

L. Zhang is an author at IMEC specializing in damage mitigation, materials engineering, and electrical insulation.

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Publications per year

2015–2015

1

Publications

1

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

Jean‐François de Marneffe, L. Zhang, Markus Heyne et al. · Journal of Applied Physics · 2015 · 23 citations

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