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Astuko Yamaguchi

AY

1

Publications

11

Citations

1

H-Index

2017

Active since

Affiliations

Hitachi (Japan)(Current)

Astuko Yamaguchi is an author at Hitachi (Japan) specializing in nanoelectronics, microelectronics, and electrical engineering.

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Publications per year

2017–2017

1

Publications

1

Enabling CD SEM metrology for 5nm technology node and beyond

Gian F. Lorusso, Takeyoshi Ohashi, Astuko Yamaguchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 11 citations

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