Akiyuki Sugiyama

Evaluation of OPC quality using automated edge placement error measurement with CD-SEM

Cyrus Tabery, Hidetoshi Morokuma, Akiyuki Sugiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 28 citations

Engineering, Manufacturing Engineering, Manufacturing Processes +8

A new matching engine between design layout and SEM image of semiconductor device

Hidetoshi Morokuma, Akiyuki Sugiyama, Yasutaka Toyoda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 18 citations

Engineering, Electrical Engineering, Manufacturing Engineering +11

High-precision contouring from SEM image in 32-nm lithography and beyond

Hiroyuki Shindo, Akiyuki Sugiyama, Hitoshi Komuro et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations

Engineering, Manufacturing Engineering, Digital Fabrication +14

Advanced CD-SEM metrology for pattern roughness and local placement of lamellar DSA

Takeshi Kato, Akiyuki Sugiyama, Kazuhiro Ueda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 11 citations

Engineering, Materials Engineering, Materials Science +16