Statistics
Publications
2
Citations
31
H-Index
2
Active since
2005
Affiliations
Yasutaka Toyoda is an author at Hitachi High-Tech (Japan) specializing in manufacturing engineering, computer-integrated manufacturing, and engineering.
Publications per year
2005–2021
2
2
A new matching engine between design layout and SEM image of semiconductor device
Hidetoshi Morokuma, Akiyuki Sugiyama, Yasutaka Toyoda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +11
Tsuyoshi Kondo, Naoma Ban, Yasushi Ebizuka et al. · Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV · 2021 · 13 citations
Engineering, Computer Science, Manufacturing Engineering +16
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