2
Publications
27
Citations
2
H-Index
2021
Active since
Affiliations
Tsuyoshi Kondo is an author at Hitachi (Japan) specializing in computer science, data science, and systems engineering.
Top concepts
MetrologyEngineeringData ScienceImage AnalysisInstrumentationComputer ScienceMachine LearningPattern RecognitionSystems EngineeringComputer Engineering
Publications per year
2021–2022
2
2
Metrology of thin resist for high NA EUVL
Gian F. Lorusso, Christophe Béral, Janusz Bogdanowicz et al. · Metrology, Inspection, and Process Control XXXVI · 2022 · 14 citations
Tsuyoshi Kondo, Naoma Ban, Yasushi Ebizuka et al. · Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV · 2021 · 13 citations
Engineering, Machine Learning, Electronic Design Automation +19
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