Concepedia
Statistics
Publications
5
Citations
69
H-Index
Active since
2017
Affiliations
IMEC(Current)
KU Leuven
Janusz Bogdanowicz is an author at IMEC specializing in materials science, electrical engineering, and semiconductor devices.
Publications per year
2017–2025
Metrology of thin resist for high NA EUVL
Gian F. Lorusso, Christophe Béral, Janusz Bogdanowicz et al. · Metrology, Inspection, and Process Control XXXVI · 2022 · 18 citations
Engineering, Electrical Engineering, Materials Science +13
Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy
Thomas Nuytten, Janusz Bogdanowicz, Liesbeth Witters et al. · APL Materials · 2018 · 14 citations · Full text
Natural Sciences, Electrical Engineering, Materials Science +17
Low temperature epitaxial growth of Ge:B and Ge <sub>0.99</sub> Sn <sub>0.01</sub> :B source/drain for Ge pMOS devices: in-situ and conformal B-doping, selectivity towards oxide and nitride with no need for any post-epi activation treatment
Anurag Vohra, Clément Porret, David Kohen et al. · Japanese Journal of Applied Physics · 2019 · 14 citations
Engineering, Electrical Engineering, Materials Science +17
Advanced Raman Spectroscopy Using Nanofocusing of Light
Thomas Nuytten, Janusz Bogdanowicz, Thomas Hantschel et al. · Advanced Engineering Materials · 2017 · 13 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +13
Epitaxial Si/SiGe Multi-Stacks: From Stacked Nano-Sheet to Fork-Sheet and CFET Devices
Roger Loo, Anjani Akula, Yosuke Shimura et al. · ECS Journal of Solid State Science and Technology · 2025 · 10 citations · Full text
Engineering, Materials Engineering, Materials Science +17
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