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3D stacked IC demonstration using a through Silicon Via First approach
J. Van Olmen, A. Mercha, Guruprasad Katti et al. · 2008 · 141 citations
Engineering, Computer Engineering, Electrical Engineering +17
First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers
S. Subramanian, M. Reza Hosseini, T. Chiarella et al. · 2020 · 119 citations
Self-heating on bulk FinFET from 14nm down to 7nm node
Doyoung Jang, E. Bury, R. Ritzenthaler et al. · 2015 · 93 citations
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