Concepedia

Stéphane Godny

SG

Statistics

Publications

2

Citations

209

H-Index

2

Active since

2013

Affiliations

Nova Measuring Instruments (Israel)(Current)

Stéphane Godny is an author at Nova Measuring Instruments (Israel) specializing in materials science, engineering, and optical polymers.

Publications per year

2013–2016

2

Publications

2

Gate-all-around MOSFETs based on vertically stacked horizontal Si nanowires in a replacement metal gate process on bulk Si substrates

Hans Mertens, R. Ritzenthaler, Andriy Hikavyy et al. · 2016 · 198 citations

, , +17

Hybrid approach to optical CD metrology of directed self-assembly lithography

Stéphane Godny, Masafumi Asano, Akiko Kawamoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations

, , +13

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