Cornel Bozdog

Optical detection of electron paramagnetic resonance in electron-irradiated GaN

Cornel Bozdog, H. Przybylińska, G. D. Watkins et al. · Physical review. B, Condensed matter · 1999 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +13

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Alok Vaid, Bin Bin Yan, Yun Tao Jiang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 65 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16

Intrinsic defects in GaN.  I.  Ga sublattice defects observed by optical detection of electron paramagnetic resonance

K. H. Chow, L. S. Vlasenko, P. Johannesen et al. · Physical Review B · 2004 · 50 citations

Natural Sciences, Materials Science, Physics +17

Hybrid metrology: from the lab into the fab

Alok Vaid, Alexander Elia, Givantha Iddawela et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 18 citations

Engineering, Manufacturing Engineering, Instrumentation +16

Hybrid metrology solution for 1X node technology

Alok Vaid, Alexander Elia, Mark Kelling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations

Engineering, Electrical Engineering, Metrology +16