Shay Wolfling

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Active since

1998

Affiliations

Nova Measuring Instruments (Israel)(Current)

Shay Wolfling is an author at Nova Measuring Instruments (Israel) specializing in natural sciences, optical interferometry, and semiconductor metrology.

Publications per year

1998–2021

Publications

Spatial phase-shift interferometry—a wavefront analysis technique for three-dimensional topometry

Shay Wolfling, Emmanuel Lanzmann, M. Israeli et al. · Journal of the Optical Society of America A · 2005 · 18 citations

Natural Sciences, Physics, Biomedical Optics +13

Hybrid metrology: from the lab into the fab

Alok Vaid, Alexander Elia, Givantha Iddawela et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 18 citations

Engineering, Manufacturing Engineering, Instrumentation +16

Model ground state of polyampholytes

Shay Wolfling, Yacov Kantor · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1998 · 12 citations · Full text

Natural Sciences, Biophysics, Physics +13

OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

Daniel Schmidt, Curtis Durfee, S. Pancharatnam et al. · Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV · 2021 · 11 citations

Engineering, Electrical Engineering, Materials Engineering +17

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