S. Arai

Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL

D. Edelstein, H. Rathore, C. Davis et al. · 2004 · 23 citations

Engineering, Chip-package Reliability Stress, Interconnect (Integrated Circuits) +20

A 45 nm CMOS node Cu/Low-k/ Ultra Low-k PECVD SiCOH (k=2.4) BEOL Technology

S. Sankaran, S. Arai, R. Augur et al. · 2006 · 22 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Reliability, yield, and performance of a 90 nm SOI/Cu/SiCOH technology

D. Edelstein, C. Davis, L. A. Clevenger et al. · 2004 · 18 citations

Engineering, Vlsi Design, Chip-package Reliability +16

Millimeter-wave power HEMTs

S. Arai, Hirokuni Tokuda · Solid-State Electronics · 1997 · 10 citations

Electrical Engineering, Millimeter Wave Technology, Engineering +5